G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONSMEASURING ANGLESMEASURING AREASMEASURING IRREGULARITIES OF SURFACES OR CONTOURS This subclass covers measuring of position or displacement in terms of linear or angular dimensions. In this subclass, the groups are distinguished by the measurement technique which is of major importance. Thus, the mere application of other techniques or means for giving a final indication does not affect the classification.Attention is drawn to the Notes following the title of class G01.Machines operated on similar principles to the hand-held devices specified in this subclass are classified with these devices. Measuring arrangements or details thereof covered by two or more of groups G01B3/00 - G01B17/00 are classified in group G01B21/00 if no single other group can be selected as being predominantly applicable. In this subclass non-limiting references (in the sense of paragraph 39 of the Guide to the IPC) may still be displayed in the scheme. G01B1/00 G01B1/00Measuring instruments characterised by the selection of material therefor G01B3/00Measuring instruments characterised by the use of mechanical techniquesWhen classifying in this group, mechanical arrangements for measuring specific parameters can be further classified in group G01B5/00. G01B3/002Details G01B3/004Scales; Graduations G01B3/006having both coarse and fine graduation G01B3/008Arrangements for controlling the measuring force G01B3/02Rulers with scales or marks for direct reading measuring tapes G01B3/10 G01B3/04rigid G01B3/06folding G01B3/08extensible G01B3/10Measuring tapes G01B3/1003characterised by structure or materialcharacterised by layout or indicia G01B3/1004Measuring tapes without casings G01B3/1005Means for controlling winding or unwinding of tapes G01B3/1007Means for locking G01B2003/101acting on the drum G01B2003/1012engaging the tape in a direction parallel to the tape itself G01B2003/1015engaging the tape in a direction transversal to the tape itself G01B2003/1017acting on the whole coil G01B3/102Means for damping G01B2003/1023Winding mechanisms G01B2003/1025operated manually, e.g. crank-handles G01B2003/1028operated by electric motors G01B2003/103operated by springs G01B2003/1033Means for activating the locking, braking or releasing of the tape, e.g. buttons G01B2003/1035by pivotal operation G01B2003/1038by translatory motion operation G01B3/1041characterised by casings G01B3/1043Details of internal structure thereof, e.g. means for coupling separately moulded casing halves G01B3/1046Details of external structure thereof, e.g. shapes for ensuring firmer hold G01B3/1048Integrated means for affixing or holding G01B2003/1051specially adapted for two or more tapes within the same casing G01B2003/1053Tape exit slots, e.g. shape or exit direction G01B3/1056Tape end arrangements, e.g. end-hooks G01B2003/1058Manufacturing or assembling methods G01B3/1061Means for displaying or assisting reading of length measurement G01B2003/1064Windows, e.g. lenses, glasses or cross-hairs G01B2003/1066Index sliding on tape G01B3/1069Electronic or mechanical display arrangements G01B3/1071Separate means for supporting or affixing measuring tapes G01B2003/1074associated with the casings G01B2003/1076associated with the end-hooks G01B2003/1079associated with the tapes G01B3/1084Tapes combined with arrangements for functions other than measuring lengths G01B2003/1087for illuminating G01B3/1089for marking, drawing or cutting G01B3/1092for performing length measurements and at least one other measurement of a different nature, e.g. bubble-type level G01B3/1094for recording information or for performing calculations G01B2003/1097Tape measures with an adhesive surface G01B3/11Chains for measuring length G01B3/12Measuring wheels G01B3/14Templates for checking contours templates for mounting doors or windows E04F21/0007 G01B3/16Compasses, i.e. with a pair of pivoted arms G01B3/163without measuring scale G01B3/166provided with a measuring scale G01B3/18Micrometers G01B3/20Slide gauges G01B3/205provided with a counter for digital indication of the measured dimension G01B3/22Feeler-pin gauges, e.g. dial gauges for measuring contours or curvatures G01B5/20 G01B3/24with open yoke, i.e. calipers G01B3/26Plug gauges G01B3/28Depth gauges G01B3/30Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip G01B3/303pre-adjustable, e.g. by means of micrometerscrew G01B3/306with inclined slide plane G01B3/32Holders therefor G01B3/34Ring or other apertured gauges, e.g. "go/no-go" gauge G01B3/36for external screw-threads G01B3/38Gauges with an open yoke and opposed faces, i.e. calipers, in which the internal distance between the faces is fixed, although it may be preadjustable G01B3/40for external screw-threads G01B3/42of limit-gauge type, i.e. "go/no-go" G01B3/40 takes precedence G01B3/44preadjustable for wear or tolerance G01B3/46Plug gauges for internal dimensions with engaging surfaces which are at a fixed distance, although they may be preadjustable G01B3/48for internal screw-threads G01B3/50of limit-gauge type, i.e. "go/no-go" G01B3/48 takes precedence G01B3/52preadjustable for wear or tolerance G01B3/56Gauges for measuring angles or tapers, e.g. conical calipers G01B3/563Protractors for use in geodesy G01C1/00; protractor heads for drawing machines B43L13/08 G01B3/566Squares G01B5/00Measuring arrangements characterised by the use of mechanical techniquesWhen classifying in this group, specific mechanical measuring instruments can be further classified in group G01B3/00. G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured G01B5/0004Supports G01B5/025 takes precedence G01B5/0007Surface plates G01B5/0009Guiding surfaces; Arrangements compensating for non-linearity there-of G01B5/0011Arrangements for eliminating or compensation of measuring errors due to temperature or weight G01B5/0014due to temperature on machine tools B23Q11/0003 G01B5/0016due to weight on machine tools B23Q11/001 G01B5/0018for measuring key-ways G01B5/0021for measuring the volumetric dimension of an object G01B5/0023Measuring of sport goods, e.g. bowling accessories, golfclubs, game balls G01B5/0025Measuring of vehicle parts G01B5/003 takes precedence G01B5/0028Brakes, brakeshoes, clutches G01B5/003Measuring of motor parts G01B5/0032Valves, actuating devices for valves G01B5/0035Measuring of dimensions of trees G01B5/0037Measuring of dimensions of welds G01B5/004for measuring coordinates of points G01B5/008using coordinate measuring machines G01B5/012Contact-making feeler heads therefor G01B5/016Constructional details of contacts G01B5/02for measuring length, width or thickness G01B5/004, G01B5/08 take precedence G01B5/025Measuring of circumference; Measuring length of ring-shaped articles G01B5/0035 takes precedence G01B5/04specially adapted for measuring length or width of objects while moving G01B5/043for measuring length G01B5/046for measuring width G01B5/06for measuring thickness G01B5/061height gauges G01B5/063provided with a slide which may be moved along a vertical support by means of a micrometer screw G01B5/065provided with a slide which may be fixed along its vertical support in discrete calibrated position G01B5/066of coating G01B5/068of objects while moving G01B5/066 takes precedence G01B5/08for measuring diameters G01B5/0035 takes precedence; measuring radius of curvature G01B5/213 G01B5/10of objects while moving G01B5/12internal diameters G01B5/14for measuring distance or clearance between spaced objects or spaced apertures G01B5/24 takes precedence G01B5/143between holes on a workpiece G01B5/146measuring play on bearings G01B5/16between a succession of regularly spaced objects or regularly spaced apertures G01B5/163of screw-threads G01B5/166of gear teeth G01B5/18for measuring depth G01B5/20for measuring contours or curvatures G01B5/201for measuring roundness G01B5/202of gears G01B5/204of screw-threads G01B5/205of turbine blades or propellers G01B5/207using a plurality of fixed, simultaneously operating transducers G01B5/213 - G01B5/22 take precedence G01B5/213for measuring radius of curvature G01B5/22Spherometers G01B5/24for measuring angles or tapersfor testing the alignment of axes G01B5/241for measuring conicity G01B5/242Sine bars; Sine plates G01B5/243for measuring chamfer see G01B3/56 G01B5/245for testing perpendicularity G01B5/25for testing the alignment of axes G01B5/252for measuring eccentricity, i.e. lateral shift between two parallel axes G01B5/255for testing wheel alignment G01B5/26for measuring areas, e.g. planimeters G01B5/28for measuring roughness or irregularity of surfaces G01B5/285for controlling eveness G01B5/30for measuring the deformation in a solid, e.g. mechanical strain gauge G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques G01B7/001Constructional details of gauge heads G01B7/012 takes precedence G01B7/002Constructional details of contacts for gauges actuating one or more contacts G01B7/016 takes precedence G01B7/003for measuring position, not involving coordinate determination coordinate measuring G01B7/004 G01B7/004for measuring coordinates of points G01B7/008using coordinate measuring machines G01B7/012Contact-making feeler heads therefor G01B7/016Constructional details of contacts G01B7/02for measuring length, width or thickness G01B7/004, G01B7/12 take precedence G01B7/023for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence G01B7/026for measuring length of cable, band or the like, which has been paid out, e.g. from a reel measuring length of objects while moving G01B7/04 G01B7/04specially adapted for measuring length or width of objects while moving G01B7/042for measuring length G01B7/044using capacitive means G01B7/046using magnetic means G01B7/048for measuring width G01B7/06for measuring thickness measuring during the manufacture of coatings C23C14/54 G01B7/063using piezo-electric resonators G01B7/066for measuring thickness of coating apparatus or processes for the manufacture of piezo-electric or electrostrictive resonators for obtaining desired frequency H03H3/04 G01B7/08using capacitive means G01B7/082Height gauges G01B7/085for measuring thickness of coating G01B7/087for measuring of objects while moving G01B7/085 takes precedence G01B7/10using magnetic means, e.g. by measuring change of reluctance G01B7/102Height gauges G01B7/105for measuring thickness of coating G01B7/107for measuring objects while moving G01B7/105 takes precedence G01B7/12for measuring diameters G01B7/125of objects while moving G01B7/13Internal diameters G01B7/14for measuring distance or clearance between spaced objects or spaced apertures G01B7/30 takes precedence G01B7/142between holes on a workpiece G01B7/144Measuring play on bearings G01B7/146Measuring on gear teeth G01B7/148Measuring on screw threads G01B7/15being regularly spaced G01B7/16for measuring the deformation in a solid, e.g. by resistance strain gauge G01B7/18using change in resistance G01B7/20formed by printed-circuit technique G01B7/22using change in capacitance G01B7/24using change in magnetic properties G01B7/26for measuring depth G01B7/28for measuring contours or curvatures G01B7/281for measuring contour or curvature along an axis, e.g. axial curvature of a pipeline or along a series of feeder rollers G01B7/282for measuring roundness G01B7/283of gears G01B7/284of screw-threads G01B7/285of propellers or turbine blades G01B7/286Spherometers G01B7/287using a plurality of fixed, simultaneously operating transducers G01B7/293 takes precedence G01B7/293for measuring radius of curvature G01B7/30for measuring angles or tapersfor testing the alignment of axes G01B7/305for testing perpendicularity G01B7/31for testing the alignment of axes G01B7/312for measuring eccentricity, i.e. lateral shift between two parallel axes G01B7/315for testing wheel alignment G01B7/32for measuring areas G01B7/34for measuring roughness or irregularity of surfaces G01B7/345for measuring evenness G01B9/00Measuring instruments characterised by the use of optical techniquesWhen classifying in this group, optical arrangements for measuring specific parameters can be further classified in group G01B11/00. G01B9/02Interferometers G01B9/02001characterised by controlling or generating intrinsic radiation properties G01B9/02002using two or more frequencies G01B9/02003using beat frequencies G01B9/02004using frequency scans G01B9/02005using discrete frequency stepping or switching G01B9/02007Two or more frequencies or sources used for interferometric measurement using only beat G01B9/02003 G01B9/02008by using a frequency comb G01B9/02009by using two or more low coherence lengths using different or varying spectral width G01B9/0201using temporal phase variation G01B9/02011using temporal polarization variation G01B9/02012using temporal intensity variation G01B9/02014by using pulsed light G01B9/02015characterised by the beam path configuration G01B9/02016contacting two or more objects G01B9/02017with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations G01B9/02018Multipass interferometers, e.g. double-pass G01B9/02019contacting different points on same face of object G01B9/02021contacting different faces of object, e.g. opposite faces G01B9/02022contacting one object by grazing incidence G01B9/02023Indirect probing of object, e.g. via influence on cavity or fibre G01B9/02024Measuring in transmission, i.e. light traverses the object G01B9/02025Interference between three or more discrete surfaces G01B9/02027Two or more interferometric channels or interferometers G01B9/02028Two or more reference or object arms in one interferometer G01B9/02029Combination with non-interferometric systems, i.e. for measuring the object G01B9/0203With imaging systems G01B9/02031With non-optical systems, e.g. tactile G01B9/02032generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam shearing interferometers G01B9/02098 G01B9/02034characterised by particularly shaped beams or wavefronts G01B9/02035Shaping the focal point, e.g. elongated focus G01B9/02036by using chromatic effects, e.g. a wavelength dependent focal point G01B9/02037by generating a transverse line focus G01B9/02038Shaping the wavefront, e.g. generating a spherical wavefront G01B9/02039by matching the wavefront with a particular object surface shape G01B9/02041characterised by particular imaging or detection techniques G01B9/02042Confocal imaging G01B9/02043Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging G01B9/02044Imaging in the frequency domain, e.g. by using a spectrometer G01B9/02045using the Doppler effect G01B9/02047using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path G01B9/02048Rough and fine measurement G01B9/02049characterised by particular mechanical design details G01B9/0205of probe head G01B9/02051Integrated design, e.g. on-chip or monolithic G01B9/02052Protecting, e.g. shock absorbing, arrangements G01B9/02054Hand held G01B9/02055Reduction or prevention of errorsTestingCalibration G01B9/02056Passive reduction of errors G01B9/02057by using common path configuration, i.e. reference and object path almost entirely overlapping G01B9/02058by particular optical compensation or alignment elements, e.g. dispersion compensation G01B9/02059Reducing effect of parasitic reflections, e.g. cyclic errors G01B9/02061Reduction or prevention of effects of tilts or misalignment G01B9/02062Active error reduction, i.e. varying with time G01B9/02063by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography G01B9/02064by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry G01B9/02065using a second interferometer before or after measuring interferometer G01B9/02067by electronic control systems, i.e. using feedback acting on optics or light G01B9/02068Auto-alignment of optical elements G01B9/02069Synchronization of light source or manipulator and detector G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer G01B9/02071by measuring path difference independently from interferometer G01B9/02072by calibration or testing of interferometer G01B9/02074of the detector G01B9/02075of particular errors G01B9/02076Caused by motion G01B9/02077of the object G01B9/02078Caused by ambiguity G01B9/02079Quadrature detection, i.e. detecting relatively phase-shifted signals G01B9/02081simultaneous quadrature detection, e.g. by spatial phase shifting G01B9/02082Caused by speckles G01B9/02083characterised by particular signal processing and presentation G01B9/02084Processing in the Fourier or frequency domain when not imaged in the frequency domain G01B9/02085Combining two or more images of different regions G01B9/02087Combining two or more images of the same region G01B9/02088Matching signals with a database G01B9/02089Displaying the signal, e.g. for user interaction G01B9/0209Low-coherence interferometers G01B9/02091Tomographic interferometers, e.g. based on optical coherence G01B9/02092Self-mixing interferometers, i.e. feedback of light from object into laser cavity G01B9/02094Speckle interferometers, i.e. for detecting changes in speckle pattern G01B9/02095detecting deformation from original shape G01B9/02096detecting a contour or curvature G01B9/02097Self-interferometers G01B9/02098Shearing interferometers G01B9/021using holographic techniques G01B9/023for contour producing G01B9/025 - G01B9/029 take precedence G01B9/025Double exposure technique G01B9/027in real time G01B9/029by time averaging G01B9/04Measuring microscopes G01B9/06Measuring telescopes G01B9/08Optical projection comparators G01B9/10Goniometers for measuring angles between surfaces G01B11/00Measuring arrangements characterised by the use of optical techniquesWhen classifying in this group, specific optical measuring instruments can be further classified in group G01B9/00. G01B11/002for measuring two or more coordinates G01B11/005coordinate measuring machines G01B11/007feeler heads therefor G01B11/02for measuring length, width or thickness G01B11/08 takes precedence G01B11/022by means of tv-camera scanning G01B11/024by means of diode-array scanning G01B11/026by measuring distance between sensor and object G01B11/0608 takes precedence G01B11/028by measuring lateral position of a boundary of the object G01B11/022, G01B11/024, G01B11/04 take precedence G01B11/03by measuring coordinates of points G01B11/04specially adapted for measuring length or width of objects while moving G01B11/043for measuring length G01B11/046for measuring width G01B11/06for measuring thickness ; e.g. of sheet material thickness measurement by thermal means G01B21/085 G01B11/0608Height gauges G01B11/0616of coating G01B11/0625with measurement of absorption or reflection G01B11/0633using one or more discrete wavelengths G01B11/0641with measurement of polarization G01B11/065using one or more discrete wavelengths G01B11/0658with measurement of emissivity or reradiation G01B11/0666using an exciting beam and a detection beam including surface acoustic waves [SAW] G01B11/0675using interferometry G01B11/0683measurement during deposition or removal of the layer G01B11/0691of objects while moving G01B11/0616 takes precedence G01B11/08for measuring diameters G01B11/10of objects while moving G01B11/105using photoelectric detection means G01B11/12internal diameters G01B11/14for measuring distance or clearance between spaced objects or spaced apertures G01B11/26 takes precedence; rangefinders G01C3/00 G01B11/16for measuring the deformation in a solid, e.g. optical strain gauge G01B11/161by interferometric means G01B11/162by speckle- or shearing interferometry G01B11/164by holographic interferometry G01B11/165by means of a grating deformed by the object G01B11/167by projecting a pattern on the object G01B11/168by means of polarisation G01B11/18using photoelastic elements G01B11/20using brittle lacquer G01B11/22for measuring depth G01B11/24for measuring contours or curvatures G01B11/2408for measuring roundness G01B11/2416of gears optical projection profile comparators G01B9/08 G01B11/2425of screw-threads G01B11/2433for measuring outlines by shadow casting G01B11/2441using interferometry G01B11/245using a plurality of fixed, simultaneously operating transducers G01B11/2408 - G01B11/2425, G01B11/255 take precedence G01B11/25by projecting a pattern, e.g. one or more lines, moiré fringes on the object G01B11/255 takes precedence ; image analysis for depth or shape recovery G06T7/50 G01B11/2504Calibration devices G01B11/2509Color coding G01B11/2513with several lines being projected in more than one direction, e.g. grids, patterns G01B11/2518Projection by scanning of the object G01B11/2522the position of the object changing and being recorded G01B11/2527with phase change by in-plane movement of the patern G01B11/2531using several gratings, projected with variable angle of incidence on the object, and one detection device G01B11/2536using several gratings with variable grating pitch, projected on the object with the same angle of incidence G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré G01B11/2545with one projection direction and several detection directions, e.g. stereo G01B11/255for measuring radius of curvature measuring diameter G01B11/08 G01B11/26for measuring angles or tapersfor testing the alignment of axes G01B11/27for testing the alignment of axes means for centering or aligning a light guide within a ferrule G02B6/3834 G01B11/272using photoelectric detection means G01B11/275for testing wheel alignment G01B11/2755using photoelectric detection means G01B11/28for measuring areas G01B11/285using photoelectric detection means G01B11/30for measuring roughness or irregularity of surfaces G01B11/303using photoelectric detection means G01B11/306for measuring evenness G01B13/00Measuring arrangements characterised by the use of fluids G01B13/02for measuring length, width or thickness G01B13/08 takes precedence G01B13/03by measuring coordinates of points G01B13/04specially adapted for measuring length or width of objects while moving G01B13/06for measuring thickness G01B13/065Height gauges G01B13/08for measuring diameters G01B13/10internal diameters G01B13/12for measuring distance or clearance between spaced objects or spaced apertures G01B13/18 takes precedence G01B13/14for measuring depth G01B13/16for measuring contours or curvatures G01B13/18for measuring angles or tapersfor testing the alignment of axes G01B13/19for testing the alignment of axes G01B13/195for testing wheel alignment G01B13/20for measuring areas, e.g. pneumatic planimeters G01B13/22for measuring roughness or irregularity of surfaces G01B13/24for measuring the deformation in a solid G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons characterised by the use of optical techniques G01B9/00, G01B11/00 G01B15/02for measuring thickness G01B15/025by measuring absorption G01B15/04for measuring contours or curvatures G01B15/045by measuring absorption G01B15/06for measuring the deformation in a solid G01B15/08for measuring roughness or irregularity of surfaces G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations G01B17/02for measuring thickness G01B17/025for measuring thickness of coating G01B17/04for measuring the deformation in a solid, e.g. by vibrating string G01B17/06for measuring contours or curvatures G01B17/08for measuring roughness or irregularity of surfaces G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant Measuring arrangements or details thereof covered by two or more of groups G01B3/00 - G01B17/00 are classified in this group if no single other group can be selected as being predominantly applicable. G01B21/02for measuring length, width, or thickness G01B21/10 takes precedence G01B21/04by measuring coordinates of points G01B21/042Calibration or calibration artifacts G01B3/30, G01B9/02072 take precedence G01B21/045Correction of measurements G01B9/02055 takes precedence G01B21/047Accessories, e.g. for positioning, for tool-setting, for measuring probes G01B21/06specially adapted for measuring length or width of objects while moving G01B21/065for stretchable materials G01B21/08for measuring thickness G01B21/085using thermal means G01B21/10for measuring diameters G01B21/12of objects while moving G01B21/14internal diameters of boreholes or wells E21B47/08 G01B21/16for measuring distance of clearance between spaced objects G01B21/18for measuring depth G01B21/20for measuring contours or curvatures, e.g. determining profile G01B21/22for measuring angles or tapersfor testing the alignment of axes G01B21/24for testing alignment of axes G01B21/26for testing wheel alignment G01B21/28for measuring areas G01B21/30for measuring roughness or irregularity of surfaces G01B21/32for measuring the deformation in a solid G01B2210/00 G01B2210/00Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors G01B2210/10Wheel alignment G01B2210/12Method or fixture for calibrating the wheel aligner G01B2210/14One or more cameras or other optical devices capable of acquiring a two-dimensional image G01B2210/143One or more cameras on each side of a vehicle in the main embodiment G01B2210/146Two or more cameras imaging the same area G01B2210/16Active or passive device attached to the chassis of a vehicle G01B2210/18Specially developed for using with motorbikes or other two-wheeled vehicles G01B2210/20Vehicle in a state of translatory motion G01B2210/22Wheels in a state of motion supported on rollers, rotating platform or other structure substantially capable of only one degree of rotational freedom G01B2210/24Specially developed for using with trucks or other heavy-duty vehicles G01B2210/26Algorithms, instructions, databases, computerized methods and graphical user interfaces employed by a user in conjunction with the wheel aligner G01B2210/28Beam projector and related sensors, camera, inclinometer or other active sensing or projecting device G01B2210/283Beam projectors and related sensors G01B2210/286Projecting a light pattern on the wheel or vehicle body G01B2210/30Reference markings, reflector, scale or other passive device G01B2210/303fixed to the ground or to the measuring station G01B2210/306Mirror, prism or other reflector G01B2210/40Caliper-like sensors G01B2210/42with one or more detectors on a single side of the object to be measured and with a backing surface of support or reference on the other side G01B2210/44with detectors on both sides of the object to be measured G01B2210/46with one or more detectors on a single side of the object to be measured and with a transmitter on the other side G01B2210/48for measurement of a wafer G01B2210/50Using chromatic effects to achieve wavelength-dependent depth resolution G01B2210/52Combining or merging partially overlapping images to an overall image G01B2210/54Revolving an optical measuring instrument around a body G01B2210/56Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth G01B2210/58Wireless transmission of information between a sensor or probe and a control or evaluation unit G01B2210/60Unique sensor identification G01B2210/62Support for workpiece air film or bearing with positive or negative pressure G01B2210/64Interconnection or interfacing through or under capping or via rear of substrate in microsensors G01B2210/66Rock or ground anchors having deformation measuring means G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02 G01B2290/10Astronomic interferometers G01B2290/15Cat eye, i.e. reflection always parallel to incoming beam G01B2290/20Dispersive element for generating dispersion G01B2290/25Fabry-Perot in interferometer, e.g. etalon, cavity G01B2290/30Grating as beam-splitter G01B2290/35Mechanical variable delay line G01B2290/40Non-mechanical variable delay line G01B2290/45Multiple detectors for detecting interferometer signals G01B2290/50Pupil plane manipulation, e.g. filtering light of certain reflection angles G01B2290/55Quantum effects G01B2290/60Reference interferometer, i.e. additional interferometer not interacting with object G01B2290/65Spatial scanning object beam G01B2290/70Using polarization in the interferometer