G01QSCANNING-PROBE TECHNIQUES OR APPARATUSAPPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] In this subclass, the first place priority rule is applied, i.e. at each hierarchical level, in the absence of an indication to the contrary, classification is made in the first appropriate place. G01Q10/00 G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe G01Q10/02Coarse scanning or positioning G01Q10/04Fine scanning or positioning G01Q10/045Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe G01Q10/06Circuits or algorithms therefor G01Q10/065Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself G01Q20/00Monitoring the movement or position of the probe G01Q20/02by optical means G01Q20/04Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezo-electric gauge G01Q30/00Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices G01Q30/02Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope G01Q30/025Optical microscopes coupled with SPM G01Q30/04Display or data processing devices G01Q30/06for error compensation G01Q30/08Means for establishing or regulating a desired environmental condition within a sample chamber G01Q30/10Thermal environment G01Q30/12Fluid environment G01Q30/14Liquid environment G01Q30/16Vacuum environment G01Q30/18Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields G01Q30/20Sample handling devices or methods G01Q40/00Calibration, e.g. of probes G01Q40/02Calibration standards and methods of fabrication thereof G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopesEssential components thereof G01Q60/02Multiple-type SPM, i.e. involving more than one SPM techniques G01Q60/04STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy] G01Q60/06SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy] G01Q60/08MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy G01Q60/10STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes G01Q60/12STS [Scanning Tunnelling Spectroscopy] G01Q60/14STP [Scanning Tunnelling Potentiometry] G01Q60/16Probes, their manufacture, or their related instrumentation, e.g. holders G01Q60/18SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes G01Q60/20Fluorescence G01Q60/22Probes, their manufacture, or their related instrumentation, e.g. holders G01Q60/24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes G01Q60/26Friction force microscopy G01Q60/28Adhesion force microscopy G01Q60/30Scanning potential microscopy G01Q60/32AC mode G01Q60/34Tapping mode G01Q60/36DC mode G01Q60/363Contact-mode AFM G01Q60/366Nanoindenters, i.e. wherein the indenting force is measured G01Q60/38Probes, their manufacture, or their related instrumentation, e.g. holders G01Q60/40Conductive probes G01Q60/42Functionalisation G01Q60/44SICM [Scanning Ion-Conductance Microscopy] or apparatus therefor, e.g. SICM probes G01Q60/46SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes G01Q60/48Probes, their manufacture, or their related instrumentation, e.g. holders G01Q60/50MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes G01Q60/52Resonance G01Q60/54Probes, their manufacture, or their related instrumentation, e.g. holders G01Q60/56Probes with magnetic coating G01Q60/58SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes G01Q60/60SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes G01Q70/00General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00 G01Q70/02Probe holders G01Q70/04with compensation for temperature or vibration induced errors G01Q70/06Probe tip arrays G01Q70/08Probe characteristics G01Q70/10Shape or taper G01Q70/12Nanotube tips G01Q70/14Particular materials G01Q70/16Probe manufacture G01Q70/18Functionalisation G01Q80/00Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08 G01Q90/00Scanning-probe techniques or apparatus not otherwise provided for