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182 lines
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182 lines
98 KiB
XML
<?xml version="1.0" encoding="UTF-8"?>
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<class-scheme publication-date="2023-02-01" scheme-type="cpc" publication-type="official">
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<classification-item breakdown-code="false" not-allocatable="true" level="5" additional-only="false" sort-key="B81B" definition-exists="true" date-revised="2023-02-01" status="published"><classification-symbol>B81B</classification-symbol><class-title date-revised="2023-02-01"><title-part><text>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES </text><reference><text>piezo-electric, electrostrictive or magnetostrictive elements <u>per se</u> <class-ref scheme="cpc">H10N30/00</class-ref></text></reference></title-part></class-title><notes-and-warnings date-revised="2013-01-01"><note type="note"><note-paragraph>This subclass <u>does not cover</u>: <subnote type="bullet"><note-paragraph>purely electrical or electronic devices <u>per se</u> which are covered by section <class-ref scheme="cpc">H</class-ref>, e.g. subclass <class-ref scheme="cpc">H01L</class-ref> or class <class-ref scheme="cpc">H10</class-ref>;</note-paragraph><note-paragraph>purely optical devices <u>per se</u> which are covered by subclasses <class-ref scheme="cpc">G02B</class-ref> or <class-ref scheme="cpc">G02F</class-ref>;</note-paragraph><note-paragraph>essentially two-dimensional structures, e.g. layered products which are covered by subclass <class-ref scheme="cpc">B32B</class-ref>;</note-paragraph><note-paragraph>chemical or biological structures <u>per se</u> which are covered by section <class-ref scheme="cpc">C</class-ref>;</note-paragraph><note-paragraph>structures in atomic scale produced by manipulation of single atoms or molecules, which are covered by group <class-ref scheme="cpc">B82B1/00</class-ref>.</note-paragraph></subnote></note-paragraph><note-paragraph>Devices or systems classified in this subclass are also classified in appropriate subclasses providing for their structural or functional features, if such features are of interest.</note-paragraph><note-paragraph>Attention is drawn to the following places: <table><row><entry><class-ref scheme="cpc">A61K9/50</class-ref></entry><entry> Microcapsules for medicinal preparations </entry></row><row><entry><class-ref scheme="cpc">B25J7/00</class-ref></entry><entry>Micromanipulators </entry></row><row><entry><class-ref scheme="cpc">G02B21/32</class-ref></entry><entry>Micromanupulators combined with microscopes </entry></row><row><entry><class-ref scheme="cpc">G11B5/127</class-ref></entry><entry>Magnetic heads </entry></row><row><entry><class-ref scheme="cpc">H01P3/08</class-ref></entry><entry>Waveguide microstrips. </entry></row></table></note-paragraph><note-paragraph>In this subclass, local "residual" subgroups, e.g. <class-ref scheme="cpc">B81B7/0077</class-ref>, are used with the following purpose:<subnote><note-paragraph> When classifying a document which does not fit in any of a set of subgroups with the same dot-level, the document should be classified in the residual group, if present, and not in the group at the hierarchical level one dot above.</note-paragraph></subnote><br/> In the example, the document shall be classified in <class-ref scheme="cpc">B81B7/0077</class-ref> and not in <class-ref scheme="cpc">B81B7/0032</class-ref> as <class-ref scheme="cpc">B81B7/0077</class-ref> is "residual" to <class-ref scheme="cpc">B81B7/0035</class-ref>-<class-ref scheme="cpc">B81B7/0074</class-ref></note-paragraph></note><note type="warning"><note-paragraph>In this subclass non-limiting references (in the sense of paragraph 39 of the Guide to the IPC) may still be displayed in the scheme.</note-paragraph></note></notes-and-warnings>
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<classification-item breakdown-code="false" not-allocatable="true" level="6" additional-only="false" sort-key="B81B1/00" date-revised="2013-01-01" status="published"><classification-symbol>B81B1/00</classification-symbol>
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<classification-item breakdown-code="false" not-allocatable="false" level="7" additional-only="false" sort-key="B81B1/00" definition-exists="true" ipc-concordant="B81B1/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B1/00</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Devices without movable or flexible elements, e.g. microcapillary devices</text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B1/002" definition-exists="false" ipc-concordant="B81B1/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B1/002</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Holes characterised by their shape, in either longitudinal or sectional plane</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B1/004" definition-exists="false" ipc-concordant="B81B1/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B1/004</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Through-holes, i.e. extending from one face to the other face of the wafer</text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B1/006" definition-exists="false" ipc-concordant="B81B1/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B1/006</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Microdevices formed as a single homogeneous piece, i.e. wherein the mechanical function is obtained by the use of the device, e.g. cutters</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B1/008" definition-exists="false" ipc-concordant="B81B1/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B1/008</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Microtips</text></CPC-specific-text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="7" additional-only="false" sort-key="B81B3/00" definition-exists="true" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/00</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes </text><reference><text><class-ref scheme="cpc">B81B5/00</class-ref> takes precedence</text></reference></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0002" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0002</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Arrangements for avoiding sticking of the flexible or moving parts</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0005" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0005</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Anti-stiction coatings</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0008" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0008</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/001" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/001</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Structures having a reduced contact area, e.g. with bumps or with a textured surface</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0013" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0013</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0016" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0016</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups <class-ref scheme="cpc">B81B3/0005</class-ref> - <class-ref scheme="cpc">B81B3/0013</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0018" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-08-01" status="published"><classification-symbol>B81B3/0018</classification-symbol><class-title date-revised="2016-08-01"><title-part><CPC-specific-text><text>Structures acting upon the moving or flexible element for transforming energy into mechanical movement or <u>vice versa</u>, i.e. actuators, sensors, generators</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0021" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2023-02-01" status="published"><classification-symbol>B81B3/0021</classification-symbol><class-title date-revised="2023-02-01"><title-part><CPC-specific-text><text>Transducers for transforming electrical into mechanical energy or <u>vice versa</u> </text><reference><text>dynamo-electric machines <class-ref scheme="cpc">H02K99/00</class-ref>; electrostatic machines <class-ref scheme="cpc">H02N1/00</class-ref>; piezo-electric devices <class-ref scheme="cpc">H10N30/00</class-ref></text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0024" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0024</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Transducers for transforming thermal into mechanical energy or <u>vice versa</u>, e.g. thermal or bimorph actuators </text><reference><text>electric motors using thermal effects <class-ref scheme="cpc">H02N10/00</class-ref></text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0027" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0027</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0029" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0029</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Transducers for transforming light into mechanical energy or viceversa</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0032" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0032</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Structures for transforming energy not provided for in groups <class-ref scheme="cpc">B81B3/0021</class-ref> - <class-ref scheme="cpc">B81B3/0029</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0035" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0035</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Constitution or structural means for controlling the movement of the flexible or deformable elements</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0037" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0037</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>For increasing stroke, i.e. achieve large displacement of actuated parts</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/004" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/004</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Angular deflection</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0043" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0043</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Increasing angular deflection</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0045" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0045</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Improve properties related to angular swinging, e.g. control resonance frequency</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0048" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0048</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Constitution or structural means for controlling angular deflection not provided for in groups <class-ref scheme="cpc">B81B3/0043</class-ref> - <class-ref scheme="cpc">B81B3/0045</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0051" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2015-09-01" status="published"><classification-symbol>B81B3/0051</classification-symbol><class-title date-revised="2015-09-01"><title-part><CPC-specific-text><text>For defining the movement, i.e. structures that guide or limit the movement of an element </text><reference><text>mechanical arrangements for preventing or damping vibration or shock <class-ref scheme="cpc">H01H3/60</class-ref></text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0054" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0054</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>For holding or placing an element in a given position</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0056" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0056</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0059" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0059</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Constitution or structural means for controlling the movement not provided for in groups <class-ref scheme="cpc">B81B3/0037</class-ref> - <class-ref scheme="cpc">B81B3/0056</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0062" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0062</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0064" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0064</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Constitution or structural means for improving or controlling the physical properties of a device</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0067" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0067</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Mechanical properties</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/007" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/007</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>For controlling stiffness, e.g. ribs</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0072" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0072</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0075" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0075</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>For improving wear resistance</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B3/0078" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0078</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Constitution or structural means for improving mechanical properties not provided for in <class-ref scheme="cpc">B81B3/007</class-ref> - <class-ref scheme="cpc">B81B3/0075</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0081" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0081</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Thermal properties</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0083" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0083</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Optical properties</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0086" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0086</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0089" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0089</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Chemical or biological characteristics, e.g. layer which makes a surface chemically active</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0091" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B3/0091</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Magnetic properties, e.g. guiding magnetic flux</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B3/0094" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0094</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Constitution or structural means for improving or controlling physical properties not provided for in <class-ref scheme="cpc">B81B3/0067</class-ref> - <class-ref scheme="cpc">B81B3/0091</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B3/0097" definition-exists="false" ipc-concordant="B81B3/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B3/0097</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Devices comprising flexible or deformable elements not provided for in groups <class-ref scheme="cpc">B81B3/0002</class-ref> - <class-ref scheme="cpc">B81B3/0094</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="7" additional-only="false" sort-key="B81B5/00" definition-exists="true" ipc-concordant="B81B5/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B5/00</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="7" additional-only="false" sort-key="B81B7/00" definition-exists="true" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B7/00</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microstructural systems; </text><CPC-specific-text><text>Auxiliary parts of microstructural devices or systems</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/0003" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0003</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>MEMS mechanisms for assembling automatically hinged components, self-assembly devices </text><reference><text>self-assembly processes <class-ref scheme="cpc">B81C1/00007</class-ref></text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/0006" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0006</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Interconnects</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/0009" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0009</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Structural features, others than packages, for protecting a device against environmental influences </text><reference><text><class-ref scheme="cpc">B81C1/00777</class-ref> takes precedence</text></reference></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0012" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0012</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0016" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0016</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Protection against shocks or vibrations, e.g. vibration damping</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0019" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0019</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Protection against thermal alteration or destruction </text><reference><text><class-ref scheme="cpc">B81B7/0083</class-ref> takes precedence</text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0022" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0022</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Protection against electrostatic discharge </text><reference><text>electrostatic discharge protection for electronic semiconductor circuits <class-ref scheme="cpc">H01L27/0248</class-ref>; circuit arrangements for protecting electronic switching circuits used for pulse technique against overcurrent or overvoltage <class-ref scheme="cpc">H03K17/08</class-ref></text></reference></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0025" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0025</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Protection against chemical alteration</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0029" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B7/0029</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Protection against environmental influences not provided for in groups <class-ref scheme="cpc">B81B7/0012</class-ref> - <class-ref scheme="cpc">B81B7/0025</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/0032" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0032</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Packages or encapsulation </text><reference><text>processes for packaging MEMS <class-ref scheme="cpc">B81C1/00261</class-ref>; packaging of smart-MEMS <class-ref scheme="cpc">B81C1/0023</class-ref></text></reference></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0035" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0035</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>for maintaining a controlled atmosphere inside of the chamber containing the MEMS</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0038" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0038</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0041" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0041</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>maintaining a controlled atmosphere with techniques not provided for in <class-ref scheme="cpc">B81B7/0038</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0045" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0045</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>for reducing stress inside of the package structure</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0048" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0048</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>between the MEMS die and the substrate</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0051" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0051</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>between the package lid and the substrate</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0054" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B7/0054</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>between other parts not provided for in <class-ref scheme="cpc">B81B7/0048</class-ref> - <class-ref scheme="cpc">B81B7/0051</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0058" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0058</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0061" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-08-01" status="published"><classification-symbol>B81B7/0061</classification-symbol><class-title date-revised="2016-08-01"><title-part><CPC-specific-text><text>suitable for fluid transfer from the MEMS out of the package or <u>vice versa</u>, e.g. transfer of liquid, gas, sound</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0064" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0064</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>for protecting against electromagnetic or electrostatic interferences</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0067" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0067</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>for controlling the passage of optical signals through the package</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/007" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/007</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Interconnections between the MEMS and external electrical signals</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0074" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0074</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0077" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B7/0077</classification-symbol><class-title date-revised="2016-05-01"><title-part><CPC-specific-text><text>Other packages not provided for in groups <class-ref scheme="cpc">B81B7/0035</class-ref> - <class-ref scheme="cpc">B81B7/0074</class-ref></text></CPC-specific-text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/008" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/008</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>MEMS characterised by an electronic circuit specially adapted for controlling or driving the same </text><reference><text><class-ref scheme="cpc">B81B7/0087</class-ref> takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator <class-ref scheme="cpc">H02N</class-ref>; control arrangements or circuits for visual indicators <class-ref scheme="cpc">G09G3/00</class-ref></text></reference></CPC-specific-text></title-part></class-title><notes-and-warnings date-revised="2013-01-01"><note type="note"><note-paragraph> This group <u>covers</u>: only MEMS with an electronic circuit which is not specific to a particular application. </note-paragraph><note-paragraph>This group <u>does not cover</u>: electronic circuits <u>per se</u>, e.g. for controlling or driving application specific MEMS </note-paragraph></note></notes-and-warnings></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/0083" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0083</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Temperature control</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/0087" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0087</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>On-device systems and sensors for controlling, regulating or monitoring</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="9" additional-only="false" sort-key="B81B7/009" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/009</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>Maintaining a constant temperature by heating or cooling</text></CPC-specific-text></title-part></class-title>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0093" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0093</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>by cooling</text></CPC-specific-text></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="10" additional-only="false" sort-key="B81B7/0096" definition-exists="false" ipc-concordant="B81B7/00" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B7/0096</classification-symbol><class-title date-revised="2013-01-01"><title-part><CPC-specific-text><text>by heating</text></CPC-specific-text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/02" definition-exists="true" ipc-concordant="B81B7/02" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B7/02</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] </text><reference><text><class-ref scheme="cpc">B81B7/04</class-ref> takes precedence</text></reference></title-part></class-title></classification-item>
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<classification-item breakdown-code="false" not-allocatable="false" level="8" additional-only="false" sort-key="B81B7/04" definition-exists="true" ipc-concordant="B81B7/04" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B7/04</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Networks or arrays of similar microstructural devices</text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="true" level="6" additional-only="true" sort-key="B81B201/00" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/00</classification-symbol>
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<classification-item breakdown-code="true" not-allocatable="false" level="7" additional-only="true" sort-key="B81B201/00" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/00</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Specific applications of microelectromechanical systems</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/01" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/01</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Switches</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/012" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/012</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>characterised by the shape</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/014" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/014</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>having a cantilever fixed on one side connected to one or more dimples</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/016" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/016</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>having a bridge fixed on two ends and connected to one or more dimples</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/018" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2201/018</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Switches not provided for in <class-ref scheme="cpc">B81B2201/014</class-ref> - <class-ref scheme="cpc">B81B2201/016</class-ref></text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/02" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/02</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Sensors</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0207" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0207</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Bolometers</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0214" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0214</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Biosensors</text></title-part><title-part><text>Chemical sensors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0221" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0221</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Variable capacitors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0228" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0228</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Inertial sensors</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/0235" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0235</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Accelerometers</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/0242" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0242</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Gyroscopes</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B201/025" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2201/025</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Inertial sensors not provided for in <class-ref scheme="cpc">B81B2201/0235</class-ref> - <class-ref scheme="cpc">B81B2201/0242</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0257" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0257</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Microphones or microspeakers</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0264" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0264</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Pressure sensors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0271" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0271</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Resonators</text></title-part><title-part><text>ultrasonic resonators</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0278" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0278</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Temperature sensors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0285" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/0285</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Vibration sensors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/0292" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2201/0292</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Sensors not provided for in <class-ref scheme="cpc">B81B2201/0207</class-ref> - <class-ref scheme="cpc">B81B2201/0285</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/03" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/03</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microengines and actuators</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/031" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/031</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Thermal actuators</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/032" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/032</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Bimorph and unimorph actuators, e.g. piezo and thermo</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/033" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/033</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Comb drives</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/034" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/034</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Electrical rotating micromachines</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/035" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/035</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microgears</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/036" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/036</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Micropumps</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/037" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/037</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microtransmissions</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/038" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/038</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microengines and actuators not provided for in <class-ref scheme="cpc">B81B2201/031</class-ref> - <class-ref scheme="cpc">B81B2201/037</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/04" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/04</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Optical MEMS</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/042" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/042</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Micromirrors, not used as optical switches</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/045" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/045</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Optical switches</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/047" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2201/047</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Optical MEMS not provided for in <class-ref scheme="cpc">B81B2201/042</class-ref> - <class-ref scheme="cpc">B81B2201/045</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/05" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/05</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microfluidics</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/051" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/051</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Micromixers, microreactors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/052" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/052</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Ink-jet print cartridges</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/054" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/054</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microvalves</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/055" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/055</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microneedles</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/057" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/057</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Micropipets, dropformers</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B201/058" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/058</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microfluidics not provided for in <class-ref scheme="cpc">B81B2201/051</class-ref> - <class-ref scheme="cpc">B81B2201/054</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/06" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/06</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Bio-MEMS</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/07" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/07</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Data storage devices, static or dynamic memories</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/10" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/10</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microfilters, e.g. for gas or fluids</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/11" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/11</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Read heads, write heads or micropositioners for hard- or optical disks</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/12" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2201/12</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>STM or AFM microtips</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B201/13" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2201/13</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Mechanical connectors, i.e. not functioning as an electrical connector</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="7" additional-only="true" sort-key="B81B203/00" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2203/00</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Basic microelectromechanical structures</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B203/01" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/01</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Suspended structures, i.e. structures allowing a movement</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0109" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0109</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Bridges</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0118" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0118</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Cantilevers</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0127" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0127</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Diaphragms, i.e. structures separating two media that can control the passage from one medium to another</text></title-part><title-part><text>Membranes, i.e. diaphragms with filtering function</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0136" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0136</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Comb structures</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0145" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0145</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Flexible holders</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0154" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0154</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Torsion bars</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0163" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0163</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Spring holders</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0172" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2203/0172</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Flexible holders not provided for in <class-ref scheme="cpc">B81B2203/0154</class-ref> - <class-ref scheme="cpc">B81B2203/0163</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0181" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0181</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>See-saws</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/019" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/019</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>characterized by their profile</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B203/03" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/03</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Static structures</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0307" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0307</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Anchors</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0315" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0315</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Cavities</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0323" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0323</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Grooves</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/033" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/033</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Trenches</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0338" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0338</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Channels</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0346" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2203/0346</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Grooves not provided for in <class-ref scheme="cpc">B81B2203/033</class-ref> - <class-ref scheme="cpc">B81B2203/0338</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0353" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0353</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Holes</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0361" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0361</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Tips, pillars</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/0369" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0369</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>characterized by their profile</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0376" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0376</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>rounded profile</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0384" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/0384</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>sloped profile</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B203/0392" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2203/0392</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>profiles not provided for in <class-ref scheme="cpc">B81B2203/0376</class-ref> - <class-ref scheme="cpc">B81B2203/0384</class-ref></text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B203/04" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/04</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Electrodes</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B203/05" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/05</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Type of movement</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/051" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/051</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Translation according to an axis parallel to the substrate</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/053" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/053</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Translation according to an axis perpendicular to the substrate</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/055" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/055</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/056" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/056</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Rotation in a plane parallel to the substrate</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B203/058" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/058</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Rotation out of a plane parallel to the substrate</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B203/06" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2203/06</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="7" additional-only="true" sort-key="B81B207/00" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2207/00</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microstructural systems or auxiliary parts thereof</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/01" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/01</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/012" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/012</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>the micromechanical device and the control or processing electronics being separate parts in the same package</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/015" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/015</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>the micromechanical device and the control or processing electronics being integrated on the same substrate</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/017" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2207/017</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Smart-MEMS not provided for in <class-ref scheme="cpc">B81B2207/012</class-ref> - <class-ref scheme="cpc">B81B2207/015</class-ref></text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/03" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2207/03</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Electronic circuits for micromechanical devices which are not application specific, e.g. for controlling, power supplying, testing, protecting</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/05" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/05</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Arrays</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/053" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/053</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>of movable structures</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/056" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/056</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>of static structures</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/07" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/07</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Interconnects</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/09" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/09</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Packages</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/091" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/091</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Arrangements for connecting external electrical signals to mechanical structures inside the package</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B207/092" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/092</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Buried interconnects in the substrate or in the lid</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B207/093" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/093</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Conductive package seal</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B207/094" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/094</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Feed-through, via</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="11" additional-only="true" sort-key="B81B207/095" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/095</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>through the lid</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="11" additional-only="true" sort-key="B81B207/096" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/096</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>through the substrate</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B207/097" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/097</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Interconnects arranged on the substrate or the lid, and covered by the package seal</text></title-part></class-title></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="10" additional-only="true" sort-key="B81B207/098" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2016-05-01" status="published"><classification-symbol>B81B2207/098</classification-symbol><class-title date-revised="2016-05-01"><title-part><text>Arrangements not provided for in groups <class-ref scheme="cpc">B81B2207/092</class-ref> - <class-ref scheme="cpc">B81B2207/097</class-ref></text></title-part></class-title></classification-item></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/11" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/11</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Structural features, others than packages, for protecting a device against environmental influences</text></title-part></class-title>
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<classification-item breakdown-code="true" not-allocatable="false" level="9" additional-only="true" sort-key="B81B207/115" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2013-01-01" status="published"><classification-symbol>B81B2207/115</classification-symbol><class-title date-revised="2013-01-01"><title-part><text>Protective layers applied directly to the device before packaging</text></title-part></class-title></classification-item></classification-item>
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<classification-item breakdown-code="true" not-allocatable="false" level="8" additional-only="true" sort-key="B81B207/99" definition-exists="false" ipc-concordant="CPCONLY" c-set-base-allowed="false" c-set-subsequent-allowed="true" date-revised="2017-08-01" status="published"><classification-symbol>B81B2207/99</classification-symbol><class-title date-revised="2017-08-01"><title-part><text>Microstructural systems or auxiliary parts thereof not provided for in <class-ref scheme="cpc">B81B2207/01</class-ref> - <class-ref scheme="cpc">B81B2207/115</class-ref></text></title-part></class-title></classification-item></classification-item></classification-item></classification-item></class-scheme> |